2023-2024 / SYST0020-1

Introduction to microsystems and microtechnology

Duration

24h Th, 18h Pr, 4h Labo., 20h Proj.

Number of credits

 Bachelor of Science (BSc) in Engineering5 crédits 
 Master of Science (MSc) in Biomedical Engineering5 crédits 
 Master of Science (MSc) in Electrical Engineering5 crédits 
 Master of Science (MSc) in Mechanical Engineering (EMSHIP+, Erasmus Mundus)5 crédits 
 Advanced Master in Nanotechnologies5 crédits 

Lecturer

Tristan Gilet, Jean-Michel Redouté

Language(s) of instruction

English language

Organisation and examination

Teaching in the second semester

Schedule

Schedule online

Units courses prerequisite and corequisite

Prerequisite or corequisite units are presented within each program

Learning unit contents

This course is an introduction to microtechnology and microsystems. The material covers microfabrication, MEMS sensors and actuators and their electronic interfaces, microfluidics and biosensors. Lumped element modeling is used several times throughout the course.

Learning outcomes of the learning unit

At the end of this course, the student will have a good overview of microtechnology, comprising the physical constraints at the microscale as well as the mechanical and electronic requirements applicable in MEMS. Microsystem design is learned through a series of lectures and practiced in case studies.

The student will also develop further his/her ability to perform experimental work during the lab session. This latter will give him/her a practical view of the challenges encountered while handling small-scale systems.

This course contributes to the learning outcomes I.1, I.2, II.1, II.2, II.3, III.1, III.2, IV.2, VI.1, VI.2, VII.2, VII.3, VII.4, VII.5 of the BSc in engineering.


This course contributes to the learning outcomes I.1, I.2, II.1, II.2, II.3, III.1, III.2, IV.2, VI.1, VI.2, VII.2, VII.3, VII.4, VII.5 of the MSc in biomedical engineering.


This course contributes to the learning outcomes I.1, I.2, II.1, II.2, II.3, III.1, III.2, IV.2, IV.7, VI.1, VI.2, VII.2, VII.3, VII.4, VII.5 of the MSc in electrical engineering.


This course contributes to the learning outcomes I.1, I.2, II.1, II.2, II.3, III.1, III.2, IV.2, VI.1, VI.2, VII.2, VII.3, VII.4, VII.5 of the MSc in mechanical engineering.

Prerequisite knowledge and skills

Pre-requisites:
This course involves both mechanical and electronic aspects. In electronics, we expect the students to already be able to solve elementary electronic circuits, involving ideal operational amplifiers (e.g. as seen in ELEC0052 or ELEN0075 ). In mechanics, we expect the students to alredy be able to calculate the bending deflection of a loaded beam (e.g. as seen in MEC0001) and the flow in a pipe (e.g. as seen in MECA0011). On the first day of class, two parallel catch-up sessions will be organised, one in electronics and one in mechanics, so students can brush up on either topic. 

Planned learning activities and teaching methods

The course comprises:






  • Lectures and problems, in which theory and applications are covered.
  • One lab session. The students will manipulate different small-scale systems.

Mode of delivery (face to face, distance learning, hybrid learning)

Face-to-face

Recommended or required readings

Slides
"Microsystems design', S.D. Senturia, K.A.P. 2001

Exam(s) in session

Any session

- In-person

written exam ( multiple-choice questionnaire, open-ended questions )

Written work / report


Additional information:

 




  • 1 lab report (weight 20%). One report per group, written in English. The mark is kept from the first to the second session (lab sessions are not organised during the summer).
  • Exam on theory and problems (weight 80%, notes allowed, electronic devices forbidden).

Work placement(s)

Organisational remarks and main changes to the course

The course is given in the spring, on Wednesday afternoon. The detailed course organization will be discussed on the first day of class.

An electronic version of the course material will be available online.

The lab session is mandatory. Any absence to this session will have to be officially justified.

Contacts

Tristan Gilet Assistant professor Microfluidics Lab Office: B52 - 0/420 Email: Tristan.Gilet@uliege.be
  Jean-Michel Redouté Associate professor Dept. Electrical Eng. and Computer Sci. Office: B28 - 1.83b Email: Jean-Michel.Redoute@uliege.be

Association of one or more MOOCs